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From: Japanese-English Electronic Dictionary 和英電子辞書

 其れまで
 それ迄
 其れ迄
 其迄
 irregular okurigana usage
 それまで
 Expressions (phrases, clauses, etc.)
 word usually written using kana alone
 until then
 till then
 up to that time
 word usually written using kana alone
 to that extent
 word usually written using kana alone
 the end of it
 all there is to it