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From: MDBG CC-CEDICT Chinese-English Dictionary 漢英字典

 四氟化硅 [ㄙˋ ㄈㄨˊ ㄏㄨㄚˋ ㄍㄨㄟ; si4 fu2 hua4 gui1]
 silicon tetrafluoride SiF4